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Diane Publishing Books
Gaseous Electronics Conference Radio-Frequency (GEC RF) Reference Cell: Reprint From the Journal of NIST
James K. Olthoff (ed.). The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, & theoretical modeling. This report contains 12 articles that review nearly all of the experiments & theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a “users’ guide” to the operation & performance of the GEC cell.
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