A State-of-the-Art Review by the Panel on Material

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Advanced Processing of Electronic Materials in the United States and Japan: State-of-the-Art Review

A State-of-the-Art Review by the Panel on Material

Our Price: $20.00

By Walter Bauer (ed)
Year: 1986
Pages: 42
Binding Paperback

Product Code: 1437907865

Description

A State-of-the-Art Review by the Panel on Materials Science, National Materials Advisory Board, Comm. on Engineering and Technical Systems, National Research Council. Contents: (1) Introduction: Perspectives on Surface Processing; Limits and Trends; Why Japan? (2) Processing Technologies: Ion Implantation; Directed Energy Sources for Annealing and Recrystallization; Rhin Film Epitaxy; Film Deposition; Etching and Machining; Lithography; Ultrahigh Vacuum Processing; (3) New Structures and Materials; (4) Conclusions: Electronic Materials and Surface Processing; The Japanese Position; Key Technologies; U.S. and the Future. Also includes Acronyms, and Biographical Sketches of Panel Members.

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