Gaseous Electronics Conference Radio-Frequency (GEC RF) Reference Cell: Reprint From the Journal of NIST

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Our Price: $50.00

Year: 1995
Pages: 175
Binding Paperback

Product Code: 078812708X

Description

James K. Olthoff (ed.). The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, & theoretical modeling. This report contains 12 articles that review nearly all of the experiments & theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a “users’ guide” to the operation & performance of the GEC cell.

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