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  Home > Diane Publishing Books >

Critical Issues in Scanning Electron Microscope (SEM) Metrology
Critical Issues in Scanning Electron Microscope (SEM) Metrology
 
Our Price: $15.00
Year: 1994
Pages: 31
Binding Paperback

Product Code: 0788115529

Description
 
Michael T. Postek. Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.

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