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Diane Publishing Books
Semiconductor Measurement Technology: Workshop on Mass Flow Measurement & Control for the Semiconductor Industry
Robert F. Berg (au); David S Green (au); George E. Mattingly (ed). Scientists & engineers met to identify research & standards that will benefit users & manufacturers (mfrs.) of mass flow controllers (MFCs) & related equip. Most attendees represented companies closely associated with the semiconductor industry, including mfrs. of MFCs, of process tolls, & of semiconductor devices. They were asked to identify the tech. problems limiting the productivity of the U.S. semiconductor mfg. industry, & prioritize the ways these problems can be resolved. Topics: flow meter performance; standards & calibration; gas properties; & alternatives to thermal mass flow controllers. The attendees identified recommended tasks which will guide research on gas properties, flow standards, & flow measurement techniques. Ill.
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