Join our mailing list!



Official PayPal Seal

(Your shopping cart is empty)

  Home > Diane Publishing Books >

Semiconductor Measurement Technology: Workshop on Mass Flow Measurement & Control for the Semiconductor Industry
Semiconductor Measurement Technology: Workshop on Mass Flow Measurement & Control for the Semiconductor Industry
 
Our Price: $25.00
Year: 2001
Pages: 86
Binding Paperback

Product Code: 0756746892

Description
 
Robert F. Berg (au); David S Green (au); George E. Mattingly (ed). Scientists & engineers met to identify research & standards that will benefit users & manufacturers (mfrs.) of mass flow controllers (MFCs) & related equip. Most attendees represented companies closely associated with the semiconductor industry, including mfrs. of MFCs, of process tolls, & of semiconductor devices. They were asked to identify the tech. problems limiting the productivity of the U.S. semiconductor mfg. industry, & prioritize the ways these problems can be resolved. Topics: flow meter performance; standards & calibration; gas properties; & alternatives to thermal mass flow controllers. The attendees identified recommended tasks which will guide research on gas properties, flow standards, & flow measurement techniques. Ill.

Share your knowledge of this product with other customers... Be the first to write a review
Diane Publishing Co
PO Box 617
Darby, PA 19023-0617
1-800-782-3833
 About Us
 Become an Affiliate
 Privacy Policy
 Send Us Feedback
 
Company Info | Advertising | Product Index | Category Index | Help | Terms of Use
Copyright � 2004 Diane Publishing Company. All Rights Reserved.
Built with Volusion