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Measurement of 100 nm and 60 nm Particle Standards by Differential Mobility Analysis: Reprint from the “Journal of Research of the NIST”
The Nat. Inst. of Standards & Tech. (NIST) issues

Our Price: $25.00
By George W. Mulholland (au)
Year: 2006
Pages: 56
Binding Paperback

Product Code: 1422308839

The Nat. Inst. of Standards & Tech. (NIST) issues Standard Ref. Materials (SRM) for a wide range of particle sizes. These standards are monosize polystyrene spheres suspended in water at a mass fraction in the range 0.5% to 1%. The focus of this report is the measurement results & uncertainty analyses for 2 batches of particles with nominal sizes of 100 nm & 60 nm. The 60 nm size is needed in the calibration of scanning surface inspection systems for the minimum particle size detected. These devices are used in the semiconductor industry to measure the no. of contaminant particles of size 60 nm & larger on a bare silicon wafer. The 100 nm particle discussed here is intended to replace SRM 1963. Illustrations.

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